Title:
APPARATUS FOR PULLING SEMICONDUCTOR SINGLE CRYSTAL
Document Type and Number:
Japanese Patent JPS598697
Kind Code:
A
Abstract:
PURPOSE:To enable a stable pulling of a semiconductor single crystal at a high rate of revolution, with an apparatus having a rotary pulling axis made of a flexible material, by using a fine adjustment device capable setting the eccentricity of the rotational centers of the molten liquid and the single crystal within a preset range. CONSTITUTION:The rotating mechanism of the axis for pulling single crystal, or the whole chamber including the rotating mechanism is made movable along the X-Y directions in the plane perpendicular to the rotary axis, and the eccentricity of the rotational centers of the single crystal and the molten liquid is adjusted finely within <=0.5mm.. The apparatus can be applied to any wire-driving device irrespective of the use of a guide; however, the rate of rotation can be further increased in the device having a guide. In each case, the stable pulling at a high rate of revolution can be attained only by controlling the eccentricity within 0.5mm..
Inventors:
HOSOKI YOSHISATO
Application Number:
JP11397882A
Publication Date:
January 17, 1984
Filing Date:
July 02, 1982
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
C30B15/30; H01L21/208; (IPC1-7): H01L21/02; H01L21/208
Attorney, Agent or Firm:
Eiji Morota
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