Title:
【発明の名称】真空ポンプシステム
Document Type and Number:
Japanese Patent JP2767127
Kind Code:
B2
Inventors:
IKEGAMI TATSUJI
IGUCHI MASASHI
IGUCHI MASASHI
Application Number:
JP14663289A
Publication Date:
June 18, 1998
Filing Date:
June 12, 1989
Export Citation:
Assignee:
OOSAKA SHINKU KIKI SEISAKUSHO KK
International Classes:
F04B37/16; F04B45/00; (IPC1-7): F04B37/16; F04B45/00
Domestic Patent References:
| JP6081485A | ||||
| JP62279281A | ||||
| JP60204997A |
Attorney, Agent or Firm:
Teruaki Koyama