Title:
【発明の名称】真空処理装置
Document Type and Number:
Japanese Patent JP2741926
Kind Code:
B2
Inventors:
Tamura direct
Koji Nishihata
Shigekazu Kato
Atsushi Ito
Tsunehiko Tsubone
Koji Nishihata
Shigekazu Kato
Atsushi Ito
Tsunehiko Tsubone
Application Number:
JP24226689A
Publication Date:
April 22, 1998
Filing Date:
September 20, 1989
Export Citation:
Assignee:
株式会社日立製作所
日立笠戸エンジニアリング株式会社
日立笠戸エンジニアリング株式会社
International Classes:
B01J3/02; B01J3/00; (IPC1-7): B01J3/02
Attorney, Agent or Firm:
Katsuo Ogawa (1 person outside)