PURPOSE: To elevate the reliability by providing an oxygen diffusion preventing layer between a heat negerating resistor of a thermal head and an anti-oxidation film to inhibit the oxidation of the heat generating resistor and prevent the deterioration thereof.
CONSTITUTION: A heat generating resistor 1 is formed on a glaze layer 6 on a substrate 4 and an electrody layer 7 thereon. After the patterning of the heat generating resistor 1 and the electrode layer 7. an oxygen diffusion preventing layer 10 is formed thereon covering the heat generating resistor 1 and the electrode layer 7. The oxygen diffusion preventing layer 10 uses non-oxidation material such as SiC, AlN, Si3N4, and BN. A wear resistant layer 9 comprising an anti-oxidation film 8 and a Ta2O5 and the like is formed on the oxygen diffusion preventing layer 10. Thus, as the oxygen diffusion preventing layer 10 made of the non-oxidation material is provided between the heat generating resistor 1 and the anti-oxidation film 8, the heat generating resistor is prevented from oxidation by oxygen from the anti-oxidation film thereby stabilizing the fluctuation in the resistance value of the heat generating resistor.
YOSHIMURA TAKEHIRO
TANAKA SHIYOUHEI
