Title:
【発明の名称】縦型熱処理装置
Document Type and Number:
Japanese Patent JP2935468
Kind Code:
B2
Abstract:
PURPOSE:To perform a heat treatment of a treated item while carrying out a suitable heat insulating action by a method wherein a hollow cylinder supporting a lower end of a boat and setting a soak heating zone and a heat insulating member removably installed within the hollow cylinder and capable of adjusting an effect of heat insulation are provided. CONSTITUTION:A hollow container 39 supporting a lower end of a wafer boat 37 is arranged within a reaction furnace, and a finned structure 33 having some heat insulating members is mounted on a receptacle 42 within the reaction furnace. The finned structure 33 is constructed such that a plurality of stages of finned devices comprising a spacer shaft 44 and fins 45 position set and supported at an upper end position of the spacer shaft 44 are piled up. The fin devices may easily be fitted or removed and the number of stages can be changed and an effect of heat insulation can be freely adjusted. The fin structures 33 are taken out of the hollow container 39 and the number of stages of the finned devices are set before starting a treatment in such a way as an effect of heat insulation adapted for the treatment temperature can be attained. Producing of NH4Cl near a manihold is prohibited under this heat insulation action and further a heat fluctuation in a soaking region within an inner tube 30 is reduced.
Inventors:
IWABUCHI KATSUHIKO
Application Number:
JP20849690A
Publication Date:
August 16, 1999
Filing Date:
August 06, 1990
Export Citation:
Assignee:
TOKYO EREKUTORON KK
International Classes:
C23C16/44; C23C16/46; F27B17/00; H01L21/20; H01L21/205; H01L21/31; (IPC1-7): F27B17/00; H01L21/205; H01L21/31
Domestic Patent References:
| JP147020A |
Attorney, Agent or Firm:
Noriyuki Kanasaka