【発明の名称】縦型熱処理装置 - 東京エレクトロン株式会社

Title:

【発明の名称】縦型熱処理装置

Document Type and Number:

Japanese Patent JP3138496

Kind Code:

B2

Inventors:

Reiji Niino
Isao Shiratani
Masaaki Miyakawa

Application Number:

JP16666491A

Publication Date:

February 26, 2001

Filing Date:

July 08, 1991

Export Citation:

Assignee:

東京エレクトロン株式会社

International Classes:

H01L21/22; (IPC1-7): H01L21/22

Domestic Patent References:

JP3291917A

Attorney, Agent or Firm:

Saichi Suyama (1 person outside)

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