Title:
【発明の名称】電圧検出装置
Document Type and Number:
Japanese Patent JP2571385
Kind Code:
B2
Abstract:
A voltage detector detects a voltage developing in a selected area of an object such as an integrated circuit by utilizing an electro-optic material equipped in an optical probe. A change in refractive index of the first electro-optic material which is caused by the voltage in the object, is detected as a change of polarization of a light beam passing through the first electro-optic material. In order to compensating for a polarization change caused by the spontaneous birefringence, the first and second electro-optic materials made of the same material are disposed in such a manner that the first and second electro-optic materials and aligned along a light-traveling direction with their lengths in the light-traveling direction being substantially identical and with their optic axes being perpendicular to each other.
Inventors:
AOSHIMA SHINICHIRO
TSUCHA YUTAKA
TAKAHASHI HIRONORI
TSUCHA YUTAKA
TAKAHASHI HIRONORI
Application Number:
JP13705587A
Publication Date:
January 16, 1997
Filing Date:
May 31, 1987
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK
International Classes:
G01R1/07; G01R15/24; G01R19/00; (IPC1-7): G01R19/00; G01R15/24
Domestic Patent References:
| JP57168167A | ||||
| JP58137768A | ||||
| JP63196862A | ||||
| JP58120974U |
Attorney, Agent or Firm:
Uemoto Masaharu