Title:
【発明の名称】真空装置用回転機構付きエアシリンダ
Document Type and Number:
Japanese Patent JP2645054
Kind Code:
B2
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Inventors:
KAWAMURA MASAO
YOSHIIZUMI MAKOTO
SUDO SHIN
KATO TAKEO
YOSHIIZUMI MAKOTO
SUDO SHIN
KATO TAKEO
Application Number:
JP2274988A
Publication Date:
August 25, 1997
Filing Date:
February 04, 1988
Export Citation:
Assignee:
NIPPON SHINKU GIJUTSU KK
International Classes:
B25J19/00; F16J10/00; (IPC1-7): F16J10/00; B25J19/00
Attorney, Agent or Firm:
Shigeru Yagita (3 outside)