Title:
【発明の名称】処理室に出入りする流体の流れを制御する装置
Document Type and Number:
Japanese Patent JP3014143
Kind Code:
B2
Abstract:
To control the flow of air into and/or out of a process chamber, such as a clean room, a two-stage system is disposed in conduits leading into and/or out of the process-chamber. One stage includes a regulator, having a plenum (7, 79) disposed between the environment and the air source or the vacuum source. The regulator maintains in the plenum a pressure that is between the pressures of the environment and the source and that is a constant amount different from the environment's pressure. The regulator includes a piston (5) having a frontal face (52) exposed to air in the plenum flowing between the environment and the source, and a distal face (51) exposed to the environment's pressure. The piston is mounted so as to variably impede the flow of air through the regulator and so that the weight of the piston tends to move the piston in a direction so as to lessen the piston's impedance on the air flow. The other stage includes an adjustable valve (21,25,95), located between the regulator and the environment, for further impeding the flow of air.
Inventors:
Palmer, David
Application Number:
JP50879592A
Publication Date:
February 28, 2000
Filing Date:
March 13, 1992
Export Citation:
Assignee:
Palmer, David
International Classes:
F16K31/12; F16K31/126; F24F3/16; F24F7/06; F24F11/04; F24F11/75; G05D7/00; G05D7/01; G05D7/06; G05D16/10; (IPC1-7): F24F7/06; G05D7/00
Domestic Patent References:
| JP2150643A | ||||
| JP61217641A |
Other References:
【文献】米国特許4250915(US,A)
【文献】米国特許3053272(US,A)
【文献】米国特許3053272(US,A)
Attorney, Agent or Firm:
Yuzo Yamazaki (2 outside)