Title:
【発明の名称】基板の幅にまたがる造影視野を備えた任意幅レンズアレイ
Document Type and Number:
Japanese Patent JP3409855
Kind Code:
B2
Abstract:
A system to transfer a pattern from a reticle to a substrate using a lens array having an arbitrarily wide image field that spans the width of the substrate. The disclosed system incorporates multiple, Wynne Dyson lenses arranged in serial pairs and staggered in position so that each dual serial Wynne Dyson lens system transfers a portion of the overall image from the reticle to the substrate as each are transported past the array of lens pairs. To transfer a complete, unbroken pattern on the substrate, each of the dual serial Wynne Dyson lens pairs are positioned in opposing and side-by-side positions and are staggered with respect to the scan direction. Each lens pair optionally includes individual internal adjustments, so that the pattern produced on the substrate does not contain any breaks or discontinuities.
Inventors:
Merkle, David A.
Application Number:
JP52511196A
Publication Date:
May 26, 2003
Filing Date:
February 12, 1996
Export Citation:
Assignee:
Ultratech Stepper, Incorporated
International Classes:
G02B3/00; G02B13/26; G02B17/08; G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G02B3/00; G02B17/08; G03F7/20
Domestic Patent References:
| JP757986A |
Other References:
【文献】米国特許5298939(US,A)
Attorney, Agent or Firm:
Shusaku Yamamoto