Title:
【発明の名称】半導体試料のキャパシタンス及びコンダクタンスの絶体測定用ブリッジ並びにこれを用いた分光分析方法
Document Type and Number:
Japanese Patent JPS62502828
Kind Code:
A
Inventors:
Cursor liner-
Application Number:
JP50275186A
Publication Date:
November 12, 1987
Filing Date:
May 09, 1986
Export Citation:
Assignee:
Cursor liner-
International Classes:
G01R31/26; G01R17/14; G01R27/02; G01R31/28; H01L21/66; (IPC1-7): G01R17/14; G01R27/02; G01R31/26; H01L21/66
Attorney, Agent or Firm:
Masayoshi Misawa