Title:
NONCONTACT BAKING MECHANISM
Document Type and Number:
Japanese Patent JPS594023
Kind Code:
A
Abstract:
PURPOSE:To enable a noncontact baking by constituting a unit by setting up a heater for heating air and a temperature sensor detecting the temperature of injection air to an air bearing, disposing a plurality of unit while bringing each unit to a heat-insulating state, reversing the direction of injection air of each unit system, passing an article through the injection air and baking the article. CONSTITUTION:Opening-and-closing-free gates 2, 2' are set up on both sides of a hollow device 1 consisting of a quartz pipe, etc., and a wafer to be treated 3 such as a wafer or a mask is passed between the gates. A plurality of the air bearing-heater-temperature sensor-units 4 are disposed on both sides of a path through which the wafer passes, and the quantity of air ejected and the temperature of the heater are adjusted by control panels set up to each of the units. Here, 5 represents air jets, 6 the heaters for heating air, 7 the temperature sensors and 8 the exhaust ports, and vacuum heat-insulating spacers 9 surrounded by cooling chambers 9' are mounted among respective units 4. Accordingly, a system 12 is constituted, and the article to be treated is baked or dried.
Inventors:
ARAIHARA SATOSHI
Application Number:
JP11313082A
Publication Date:
January 10, 1984
Filing Date:
June 30, 1982
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/304; G03F7/26; G03F7/40; H01L21/027; H01L21/673; (IPC1-7): H01L21/304; H01L21/68
Attorney, Agent or Firm:
Koshiro Matsuoka