PURPOSE: To facilitate maintenance and control such as the replenishment of a liquid substance and to attain miniaturization, by providing a large container above a small container into which a required amount of the liquid substance is metered while arranging an air feed tube and a supply tube to the large container to allow the same to be communicated with and connected to said small container.

CONSTITUTION: Because the pressure in a large container 13 is equal to the pressure in a small container 6 when the liquid level Ra of the liquid substance R1 in the small container 6 is positioned above the lower end of an air feed tube 16, the liquid substance R2 to be replenished in the large container 13 is not supplied into the small container 6 from a supply tube 17. When a liquid substance holder 3 and a replenishing container holder 10 are revolved and a required amount of the liquid substance in the small container 6 is metered, the liquid level Ra is fallen to be positioned below the lower end of the air feed tube 16. Whereupon, the pressure in the container 13 rises and, as a result, the liquid substance R2 to be replenished in the container 13 is flowed down to be supplied into the small container 6 from the supply tube 7.