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Title:
【発明の名称】電子衝撃加熱方式によるマグネトロン型イオン発生装置
Document Type and Number:
Japanese Patent JPS5820090
Kind Code:
B2
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Inventors:
HAYASHI CHIKARA
TSUKAGOSHI OSAMU
Application Number:
JP4841778A
Publication Date:
April 21, 1983
Filing Date:
April 24, 1978
Export Citation:
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Assignee:
ULVAC CORP
International Classes:
H01J37/08; H01J3/04; H01J25/50; H01J27/26; (IPC1-7): H01J27/22; H01J3/04; H01J37/08
Attorney, Agent or Firm:
Shigeru Yagita



 
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