PURPOSE: To eliminate the danger of waste oxygen gas explosion when treating an object with oxygen gas by a vacuum exhaustion treatment method using a combination of a water-sealed pump, an oil-rotation pump and a mechanical booster pump in treating an object with low-temperature plasma of oxygen gas, etc.
CONSTITUTION: The inside of a treating container 1 is evacuated to vacuum, and at the same time a water-sealed pump 5 and an oil-rotation pump 25 are actuated. When a present pressure is detected by a vacuum switch 13, a mechanical booster pump 4 begins to operate by the signal of the switch 13. By the relay signals of a vacuum meter 14, the pump 3 is operated and a vacuum valve 11 is closed. At the same time, the pump 25 is stopped to form a series of flow path leading to the pumps 3W5. Oxygen gas in a bomb 19 is sent into the treating container 1 by detection of pressure by the vacuum meter 14 and made into plasma by introducing micro waves to treat the surface of the object. Afterwards, a leak valve 6 is opened and the internal pressure of the container 1 is restored to the atmospheric pressure.
| JP2005021319 | AIR PURIFICATION APPARATUS |
| JPS5477284 | ION EXCHANGE MEMBRANE ELECTROLYZER |
FUKUDA KENJI
TAKAHASHI YOSHINOBU
