Title:
【発明の名称】イオン処理装置の制御方法
Document Type and Number:
Japanese Patent JP2625946
Kind Code:
B2
Inventors:
Yoshitaka Sasamura
Hiroshi Nakazato
Tsuchiya Noboru
Masashi Konishi
Hiroshi Nakazato
Tsuchiya Noboru
Masashi Konishi
Application Number:
JP20886988A
Publication Date:
July 02, 1997
Filing Date:
August 22, 1988
Export Citation:
Assignee:
Nissin Electric Co., Ltd.
International Classes:
H01J27/16; H01J37/04; H01J37/08; H01J37/30; H01J37/317; (IPC1-7): H01J37/30; H01J27/16; H01J37/08
Attorney, Agent or Firm:
Shigeki Kawase