Title:
【発明の名称】切削液及びワークの切断方法
Document Type and Number:
Japanese Patent JP2926706
Kind Code:
B2
Inventors:
YAMAGUCHI HISAFUKU
Application Number:
JP21342895A
Publication Date:
July 28, 1999
Filing Date:
August 22, 1995
Export Citation:
Assignee:
SHINETSU HANDOTAI KK
International Classes:
B28D5/04; B28D7/00; C10M173/00; H01L21/304; C10N10/06; C10N30/00; C10N30/06; C10N30/12; C10N40/22; (IPC1-7): C10M173/00; B28D5/04; B28D7/00; H01L21/304
Domestic Patent References:
| JP198696A | ||||
| JP5025471A |
Attorney, Agent or Firm:
Ryoichi Yamamoto (1 person outside)