Title:
【発明の名称】硬質カーボン保護膜の形成方法並びに磁気記録媒体及び磁気記録装置
Document Type and Number:
Japanese Patent JP3017621
Kind Code:
B2
Inventors:
Yoshinori Honda
Akira Kato
Toshinori Ohno
Shigehiko Fujimaki
Takayuki Kishikawa
Noriyuki Shige
Akira Kato
Toshinori Ohno
Shigehiko Fujimaki
Takayuki Kishikawa
Noriyuki Shige
Application Number:
JP20070493A
Publication Date:
March 13, 2000
Filing Date:
August 12, 1993
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
C23C14/34; G11B5/72; G11B5/73; G11B5/738; G11B5/84; (IPC1-7): G11B5/84; C23C14/34; G11B5/72
Attorney, Agent or Firm:
Masami Akimoto