Title:
【発明の名称】セラミックス製圧力測定センサの製造方法
Document Type and Number:
Japanese Patent JP2002500350
Kind Code:
A
Abstract:
A capacitive vacuum measuring cell includes first and second ceramic housing bodies ( 1, 4 ) joined by an edge seal ( 3 ). A thin ceramic membrane ( 2 ) is supported between first and second housing bodies ( 1, 4 ) by the edge seal ( 3 ) at a small distance from the first housing body ( 1 ) creating a reference vacuum chamber ( 25 ) therebetween. An electrically conductive material ( 7 ) coats opposing surfaces of the first housing body ( 1 ) and the membrane ( 2 ) to form a capacitor. A measurement vacuum chamber ( 26 ) is provided between the membrane ( 2 ) and the second housing body ( 4 ). A port ( 5 ) communicates with the second housing body ( 4 ) to connect the measurement vacuum chamber ( 26 ) of the measuring cell to the medium to be measured. The membrane ( 2 ) is made from an Al2O3 slurry that is sintered in a first heating step, cooled, and then reheated to smooth the membrane.
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Inventors:
Belfry, Urs
Rap, friedrich
Rap, friedrich
Application Number:
JP2000526787A
Publication Date:
January 08, 2002
Filing Date:
December 11, 1998
Export Citation:
Assignee:
Unakis Balzers Akchengezel Shaft
International Classes:
G01L9/04; G01L7/08; G01L9/00; G01L9/12; (IPC1-7): G01L9/04
Attorney, Agent or Firm:
Fukami Hisaro (5 others)