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Patent Searching and Data


Title:
DRYING DEVICE
Document Type and Number:
Japanese Patent JPH0755336
Kind Code:
A
Abstract:

PURPOSE: To provide a drying device in which the running cost of solvent used in steam drying can be reduced, dilution of the solvent can be attained and re-utilization of the solvent can be performed.

CONSTITUTION: A steam generating part 2 comprising a solvent tank 5 and a heater 6 for use in heating solvent in the solvent tank 5 is installed at a lower part of a drying chamber 1 storing a dried member A. A cooling pipe 7 is arranged at a communication part between the drying chamber 1 and a vapor generating part 2. A cooling water supplying source 10 and an air supplying source 11 are connected to the cooling pipe 7 through changing-over valves 9a, 9b and then either cooling water or air can be selectively supplied into the cooling pipe 7. In this way, cooling water is supplied into the cooling pipe 7 so as to condense vapor of the solvent and the vapor can be returned back to the vapor generating part 2. In addition, air is supplied into the cooling pipe 7 and the vapor of solvent generated from the vapor generating part 2 can be supplied into the drying chamber 1.


Inventors:
KOSHI RYOICHIRO
Application Number:
JP22215393A
Publication Date:
March 03, 1995
Filing Date:
August 13, 1993
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
TERU ENG KK
International Classes:
F26B19/00; F26B21/14; H01L21/304; (IPC1-7): F26B19/00; H01L21/304
Attorney, Agent or Firm:
Kikuhiko Nakamoto