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Title:
APERTURE AND ITS MANUFACTURE AS WELL AS BLANK USED FOR IT
Document Type and Number:
Japanese Patent JPH0817706
Kind Code:
A
Abstract:

PURPOSE: To provide an aperture which is provided with performance required as the aperture, whose manufacturing process is simplified, whose manufacturing cost is low, which is hard to break and which can be manufactured stably and easily and to provide its manufacturing method.

CONSTITUTION: An aperture is provided with a first member 2 which has a prescribed pattern for passage of a charged-particle beam and which has through holes and with a second member 1 which supports the first member 2. In the aperture, the first member 2 and the second member 1 use mutually different materials, the conductivity of the second member 1 is high, and the first member 2 and the second member 1 are bonded by a eutectic bonding operation.


Inventors:
HAYASHI KENTA
MATSUO TADASHI
Application Number:
JP14614294A
Publication Date:
January 19, 1996
Filing Date:
June 28, 1994
Export Citation:
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Assignee:
TOPPAN PRINTING CO LTD
International Classes:
G03F7/20; B81B1/00; B81C1/00; H01L21/027; (IPC1-7): H01L21/027; G03F7/20



 
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