PURPOSE: To miniaturize the sectional area of a ray direction and to microminiaturize the Faraday rotor by previously forming plural grooves of a desired shape and size on a substrate surface, growing and packing R1RIG films therein and cutting out the films orthogonally with the longitudinal direction thereof.
CONSTITUTION: The plural rectangular groove parts having ≥20μm width and depth are previously formed by etching or grinding, etc., on the surface of the wafer-shaped substrate 1 consisting of garnet single crystal. The films of liquid epitaxial crystals are formed in these groove parts up to the positions where the thicknesses of the films formed therein correspond to the original substrate surface and the liquid epitaxial crystal films are removed down to the substrate surface. The liquid epitaxial Bi substd. rare earth garnet crystals grown in the remaining groove parts are cut in the direction approximately orthogonal with the longitudinal direction of the remaining groove parts in order to obtain the length at which the Faraday rotating angle necessary for the nonreciprocal optical device is obtainable and the cut faces are optically polished in order to form incident and exit faces for rays. Antireflection films 3 are formed on these surfaces. Then, the full-surface antireflection film is formed on the R1RIG parts and the reliability is improved.
| JPH06246209 | COATING APPARATUS |
| JP6110797 | Euphotic device |
| JP4634004 | Low optical loss polymer |
TAKAHASHI KATSUMI
KONNO YOSHIHIRO
