Title:
ALIGNMENT MARK DETECTING METHOD
Document Type and Number:
Japanese Patent JPH0694422
Kind Code:
A
Abstract:
PURPOSE: To reduce misalignment that will be caused in the manufacturing process of a color filter.
CONSTITUTION: A method for detecting an alignment mark 9 that has been formed on a substrate 1 by the reflected diffraction light of laser beams R is provided with a sensor part SA for detecting a detection light PA reflected by the edge E1 of the alignment mark 9, and a sensor part SD that is adjacent to the sensor part SA for detecting the noise light ND in the direction perpendicular to the direction of the detection light PA. Out of the noise signal of the sensor part SD for detecting the noise light and the detection signal of the sensor part SA for detecting the detection light, either one of them is reversed and added.
Inventors:
NAKAJIMA EIJI
Application Number:
JP18360893A
Publication Date:
April 05, 1994
Filing Date:
July 26, 1993
Export Citation:
Assignee:
DAINIPPON PRINTING CO LTD
International Classes:
G01B11/00; G02F1/13; G03F9/00; G09F9/30; H01L21/027; H01L21/30; (IPC1-7): G01B11/00; G02F1/13; G03F9/00; G09F9/30; H01L21/027
Attorney, Agent or Firm:
Hiroki Shirai (7 outside)
Next Patent: FILM THICKNESS MEASURING DEVICE