Title:
【発明の名称】電子部品のテスト方法
Document Type and Number:
Japanese Patent JP3093285
Kind Code:
B2
Abstract:
A device (1) has a processor (13) capable of controlling test equipment (2) to carry out repeatedly at least some of its steps, each time reducing the duration of at least one of the steps until satisfying a final criterion taking into account the distribution of the electric variables measured by the equipment for each reduced duration value, and to set a new duration value at most equal to its initial value, for which the measured electric variable distribution satisfies one selected dispersion condition. The device has a function generator (14) capable of providing a function applicable to at least one of the terms of a comparison executed during one of the steps, so that the function operates on a measurement executed after the new duration.
Inventors:
Rugen, Philip
Application Number:
JP54173297A
Publication Date:
October 03, 2000
Filing Date:
May 23, 1997
Export Citation:
Assignee:
Soft link
International Classes:
G01R31/26; G01R31/28; G01R31/30; G01R31/317; G01R35/04; H01L21/66; (IPC1-7): G01R31/26; G01R31/317; H01L21/66
Domestic Patent References:
| JP9236632A |
Other References:
【文献】西独国特許出願公開3530308(DE,A1)
Attorney, Agent or Firm:
Takashi Koshiba