Title:
【発明の名称】熱伝導性エポキシプリフォームによるシリコンセグメントの垂直相互接続方法
Document Type and Number:
Japanese Patent JP2001514449
Kind Code:
A
Abstract:
An apparatus for vertically interconnecting stacks of silicon segments. Each segment includes a plurality of adjacent die on a semiconductor wafer. The plurality of die on a segment are interconnected on the segment using one or more layers of metal interconnects which extend to all four sides of the segment to provide edge bonding pads for external electrical connection points. After the die are interconnected, each segment is cut from the backside of the wafer using a bevel cut to provide four inwardly sloping edge walls on each of the segments. After the segments are cut from the wafer, the segments are placed on top of one another to form a stack. Vertically adjacent segments in the stack are electrically interconnected by applying electrically conductive epoxy to one or more sides of the stack. The inwardly sloping edge walls of each of the segments in the stack provide a recess which allows the electrically conductive epoxy to access the edge bonding pads and lateral circuits on each of the segments once the segments are stacked. A thermally conductive epoxy preform is provided between the stack of segments so that the stack of segments are epoxied together. In one embodiment, the thermally conductive epoxy preform includes a plurality of glass spheres randomly distributed within the preform to maintain a distance between the stack of segments.
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Inventors:
Vindasias, Alphonse
Sorter, Kenneth M
Sorter, Kenneth M
Application Number:
JP2000508139A
Publication Date:
September 11, 2001
Filing Date:
August 14, 1998
Export Citation:
Assignee:
Cubic Memory Incorporated
International Classes:
H01L25/18; H01L21/98; H01L23/373; H01L23/52; H01L25/065; H01L25/07; H01L29/06; (IPC1-7): H01L23/52; H01L25/065; H01L25/07; H01L25/18
Attorney, Agent or Firm:
Kazuo Shamoto (5 outside)