Title:
【発明の名称】金属及び無機絶縁物質からなる多層薄膜
Document Type and Number:
Japanese Patent JP2901936
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To industrially obtain material for a thermoelectric couple which is high sensitive and can be used at a low normal temperature, especially at 100 deg.C or lower temperature, by obtaining a large thermoelectromotive force even with a small capacity. SOLUTION: The multilayer thin film comprises a first layer having a constantan metal thin layer and inorganic insulating material thin layer, and a second layer having iron or copper metal thin layer and inorganic insulating material, alternately deposited, such that the metal thin layer and an MgO thin layer or SiO thin layer as the inorganic insulating material thin layer are alternately deposited. Further, ends of parallel side surfaces of the inorganic insulating material thin layer are alternately shorter than a lower metal thin layer, thereby adjacent metal thin layers are continuously connected via the inorganic insulating material thin layer.
Inventors:
SHINJO TERUYA
Application Number:
JP12316897A
Publication Date:
June 07, 1999
Filing Date:
April 25, 1997
Export Citation:
Assignee:
TODA KOGYO KK
SHINJO TERUYA
SHINJO TERUYA
International Classes:
G01K7/02; C23C14/08; H01L35/08; H01L35/14; H01L35/20; H01L35/32; (IPC1-7): H01L35/32; H01L35/20
Other References:
【文献】特許2840737(JP,B2)