Title:
【発明の名称】針プローブ測定装置と組み合わせた光学表面計
Document Type and Number:
Japanese Patent JP2001508177
Kind Code:
A
Abstract:
An optical profilometer and a stylus probe measuring device used in the same instrument have the advantage that these two sensors can be quickly switched between each other. This can be an advantage when used to measure samples, since the optical profilometer can be used until a sample is found to be outside of the desired tolerances. Afterwards, the stylus probe measuring device can be used to accurately determine the profile data. This is an advantage because an optical profilometer is relatively quick, and the stylus probe measuring device is relatively accurate. Additionally, since the optical profilometer and stylus probe device are in the same instrument, the X and Y positions of these devices can be interrelated accurately. This allows images to be produced where the positions on the images can be easily correlated. For example, measurement cursors in sensor data displays can correlated by the positional offset information.
Inventors:
Sam Sabal, Amin
Webber, michael
McWade, Thomas
Kun, William, Pee.
Parkes, Robert, Yi.
Webber, michael
McWade, Thomas
Kun, William, Pee.
Parkes, Robert, Yi.
Application Number:
JP53099698A
Publication Date:
June 19, 2001
Filing Date:
January 02, 1998
Export Citation:
Assignee:
KLA-Tenker Corporation
International Classes:
G01B21/30; G01B11/00; G01B21/04; G01Q30/02; G01Q60/24; (IPC1-7): G01B21/30; G01N13/10
Attorney, Agent or Firm:
Toshi Inoguchi