Title:
【発明の名称】オルガノシロキサンオリゴマー液及びそれを用いた有機塗布ガラス膜の形成方法
Document Type and Number:
Japanese Patent JP3370792
Kind Code:
B2
Inventors:
Takeshi Furusawa
Yoshio Homma
Sato
Yasuo Shimamura
Hiroyuki Morishima
Yasuhiro Yamamoto
Yoshio Homma
Sato
Yasuo Shimamura
Hiroyuki Morishima
Yasuhiro Yamamoto
Application Number:
JP22758994A
Publication Date:
January 27, 2003
Filing Date:
September 22, 1994
Export Citation:
Assignee:
株式会社日立製作所
日立化成工業株式会社
日立化成工業株式会社
International Classes:
B05D7/24; C08G77/06; C09D183/04; H01L21/312; H01L21/768; H01L23/522; (IPC1-7): C09D183/04; B05D7/24; C08G77/06; H01L21/312; H01L21/768
Domestic Patent References:
| JP649231A | ||||
| JP62230828A | ||||
| JP1216543A | ||||
| JP4352456A | ||||
| JP453832A |
Attorney, Agent or Firm:
Yasuo Sakuta (1 outside)