Title:
INSPECTING METHOD FOR SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS5856351
Kind Code:
A
Abstract:
PURPOSE:To inspect the defective attitude and presence of an element electrically by a method wherein an electrode to be measured elastically supported is dropped into a sealing hole by stages from the upper section of the sealing hole, measuring voltage is applied between a lead wire and the electrode to be measured and a continuity test is executed. CONSTITUTION:The lower surfaces of each electrode to be measured 14l, 14m, 14n are dropped into the sealing holes 7l, 7m, 7n so as to reach positions higher than slags 3 only by predetermined height alpha(h1
Inventors:
KUROKI MASANORI
Application Number:
JP15587381A
Publication Date:
April 04, 1983
Filing Date:
September 29, 1981
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
G01R31/26; H01L21/66; H01L21/68; (IPC1-7): G01R31/26; H01L21/68
Attorney, Agent or Firm:
Shogo Ehara