Title:
【発明の名称】張力をかけられた振動板を持った圧力変換器
Document Type and Number:
Japanese Patent JP2001525539
Kind Code:
A
Abstract:
A capacitive pressure transducer includes a conductive diaphragm positioned between pneumatically separated chambers. The diaphragm is fixed and sealingly coupled at its periphery to the peripheral rim of a concave body member. The diaphragm is supported in tension by the peripheral rim of the body member. An electrode assembly, supported by the body member establishes a substantially planar conductive surface opposite to and spaced apart by a nominal gap from the conductive diaphragm. The body member includes a yieldable portion that is adapted to radially expand its peripheral rim in response to forces applied to the body member. When the forces are applied, the body member becomes strained beyond its elastic limit and takes a permanent set whereby the peripheral rim is expanded and the diaphragm becomes tensioned. The tension in the diaphragm can be determined as a function of the geometry of the body member and deformation resulting from the forces applied. Additional forces can be applied at a later point in time in order to change or adjust the tension in the diaphragm.
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Inventors:
Sheer Lee
Application Number:
JP2000523532A
Publication Date:
December 11, 2001
Filing Date:
November 16, 1998
Export Citation:
Assignee:
Setra Systems, Inc.
International Classes:
G01L9/00; G01L13/00; (IPC1-7): G01L9/00
Attorney, Agent or Firm:
Motohiro Kurauchi (1 outside)