Title:
CCD IMAGE DEVICE AND PREPARATION THEREOF
Document Type and Number:
Japanese Patent JPH0774334
Kind Code:
A
Abstract:
PURPOSE: To form a CCD image element having excellent smear phenomenon reducing characteristics, by arranging a second conductivity type region for smear phenomenon reduction below a first conductivity type BCCD. CONSTITUTION: N-type ions are implanted in a specified region on an N-type substrate 11, and high concentration P-type ions are implanted in a region which is isolated by a specified gap from the region to the horizontal direction. Thermal treatment is performed, and an N-type region 12 for OFD voltage control and a high concentration P-type region 13 for smear phenomenon reduction are formed by diffusing the implanted ions. A P-type epitaxial layer 14 is wholly formed on the regions 12 and 13. N-type ions are implanted in the surface region of the P-type epitaxial layer 14, and an N-type photodiode 15 and an N-type BCCD 16 are formed on the upper parts of the N-type region 12 for OFD voltage control and the high concentration P-type region 13 for smear phenomenon reduction. Since the high concentration P-type region 13 for smear phenomenon reduction is formed below the N-type BCCD 16, a CCD image element having excellent smear phenomenon reduction characteristics can be formed.
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Inventors:
I SON MIN
Application Number:
JP10722991A
Publication Date:
March 17, 1995
Filing Date:
May 13, 1991
Export Citation:
Assignee:
GOLD STAR ELECTRONICS
International Classes:
H01L27/14; H01L27/148; (IPC1-7): H01L27/148
Domestic Patent References:
| JPS6365668A | 1988-03-24 | |||
| JPS6076884A | 1985-05-01 | |||
| JPS60169165A | 1985-09-02 | |||
| JPH01207964A | 1989-08-21 |
Attorney, Agent or Firm:
Junnosuke Nakamura (2 outside)
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