Title:
【発明の名称】レジスト剥離装置、及びレジスト剥離方法
Document Type and Number:
Japanese Patent JP3344994
Kind Code:
B2
More Like This:
Inventors:
Minoru Doi
Application Number:
JP2000251348A
Publication Date:
November 18, 2002
Filing Date:
August 22, 2000
Export Citation:
Assignee:
Semiconductor Leading Edge Technologies, Inc.
International Classes:
G03F7/42; H01L21/02; H01L21/027; H01L21/306; (IPC1-7): H01L21/027; G03F7/42; H01L21/306
Domestic Patent References:
| JP4348029A | ||||
| JP200012499A | ||||
| JP7169730A |
Attorney, Agent or Firm:
Mamoru Takada (2 outside)