Title:
【発明の名称】透過電子顕微鏡分析用の試料及びその製造方法
Document Type and Number:
Japanese Patent JP2902612
Kind Code:
B2
Abstract:
A method for manufacturing a transmission electron microscope analysis sample of a substrate containing an insulating body or an insulating sample includes the steps of: depositing a conductive material on the sample and then polishing the sample using a focused ion beam. The polishing step removes the conductive material from the analysis point of the sample, such that an electron projection and transmission path is formed through the sample at the analysis point. However, the conductive material is not removed from the remainder of the sample, not including the analysis point, thereby forming a ground path for any charges formed in the sample.
Inventors:
IN SANKOKU
GYOKU SHOHYUKU
HAYASHI SHOSHO
GYOKU SHOHYUKU
HAYASHI SHOSHO
Application Number:
JP11746297A
Publication Date:
June 07, 1999
Filing Date:
April 22, 1997
Export Citation:
Assignee:
SANSEI DENSHI KK
International Classes:
G01N1/32; H01L21/66; G01N1/28; (IPC1-7): G01N1/28; G01N1/32
Domestic Patent References:
| JP85528A | ||||
| JP2205762A | ||||
| JP6249805A | ||||
| JP1062323A | ||||
| JP3285242A |
Attorney, Agent or Firm:
Hidekazu Miyoshi (1 outside)