Title:
【発明の名称】走査型露光装置、及び該装置を用いる素子製造方法
Document Type and Number:
Japanese Patent JP3339631
Kind Code:
B2
Inventors:
Naomasa Shiraishi
Kenji Nishi
Kenji Nishi
Application Number:
JP2000111825A
Publication Date:
October 28, 2002
Filing Date:
April 13, 2000
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP4225359A | ||||
| JP4196513A | ||||
| JP545605A | ||||
| JP62115718A | ||||
| JP622540A |
Attorney, Agent or Firm:
Satoshi Ohmori