Title:
【発明の名称】大気圧でのグロー放電プラズマによる表面洗浄装置および洗浄方法
Document Type and Number:
Japanese Patent JPH11507990
Kind Code:
A
Abstract:
The surface of a workpiece is cleaned by generating a steady-state one atmosphere glow discharge plasma above the surface of the workpiece. The use of one atmosphere, uniform glow discharge plasmas generated by a low frequency RF ion trapping mechanisms is preferred. The plasma used to effect surface cleaning may be formed in atmospheric air or other gases at about one atmosphere of pressure, or at pressures below or above one atmosphere.
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Inventors:
Ross, John Reese
Application Number:
JP53677196A
Publication Date:
July 13, 1999
Filing Date:
June 03, 1996
Export Citation:
Assignee:
The University of Tennessee Research Corporation
International Classes:
B08B7/00; B29C59/14; B63B1/34; B64C23/00; B64D15/14; C23F4/00; C23G5/00; D04H1/56; F15D1/12; H01J37/32; H01L21/302; H01L21/304; H01L21/306; H01L21/3065; H05B7/16; H05H1/46; (IPC1-7): C23G5/00; B08B7/00; C23F4/00; H01L21/304; H01L21/3065
Attorney, Agent or Firm:
Nao Okuyama (3 others)