Title:
【発明の名称】製造工程における生成物の移送方法
Document Type and Number:
Japanese Patent JPS63502176
Kind Code:
A
Inventors:
Nudrundel, Johann
Application Number:
JP50078487A
Publication Date:
August 25, 1988
Filing Date:
January 20, 1987
Export Citation:
Assignee:
Applied Vacuum Scandinavian Akchebu-Rug
International Classes:
B65G49/00; B65G49/07; C23C14/56; H01L21/677; (IPC1-7): B65G49/00
Attorney, Agent or Firm:
Soichi Takezawa