Title:
【発明の名称】真空ポンプおよびその駆動方法
Document Type and Number:
Japanese Patent JP3084513
Kind Code:
B2
Inventors:
Yasuhiko Sasaki
Akiomi Kawano
Akiomi Kawano
Application Number:
JP3456597A
Publication Date:
September 04, 2000
Filing Date:
February 19, 1997
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
F04B45/02; B81B3/00; (IPC1-7): F04B45/02
Domestic Patent References:
| JP57122172A | ||||
| JP5188092A | ||||
| JP7332232A | ||||
| JP4128578A | ||||
| JP5240804A | ||||
| JP3104193U |
Attorney, Agent or Firm:
Tatsuyuki Unuma