Title:
【発明の名称】バルブ装置及びその制御方法
Document Type and Number:
Japanese Patent JP2820135
Kind Code:
B2
Inventors:
Shunichi Matsuno
Yoshihiro Kakimoto
Yoshihiro Kakimoto
Application Number:
JP27105096A
Publication Date:
November 05, 1998
Filing Date:
October 14, 1996
Export Citation:
Assignee:
NEC
International Classes:
F16K1/00; C23C16/44; C23C16/455; F16K51/00; H01L21/205; (IPC1-7): F16K1/00; F16K51/00
Domestic Patent References:
| JP6346980A | ||||
| JP6101782A | ||||
| JP219974U |
Attorney, Agent or Firm:
Nobuo Takahashi (5 others)