Title:
MANUFACTURE OF JOSEPHSON ELEMENT
Document Type and Number:
Japanese Patent JPS6043886
Kind Code:
A
Abstract:
PURPOSE:To constitute a coupling section with high accuracy by forming a stepped section to a substrate, shaping both superconductors while using the stepped section as a border and forming the coupling section to the stepped section. CONSTITUTION:A metallic film 5 easy to be processed by the ion beams of gold, chromium or the like is formed on a substrate 1 consisting of silicon, etc., photo-engraving and etching technique are executed to the metallic film 5, and the metallic film 5 on a section to which one superconductor 3 must be shaped is removed and shaped. A stepped section is formed through the etching of the substrate 1 while using the left metallic film 5 as a mask while an intruding section is formed under the metallic film 5, and an eave section 5a is left to the metallic film 5. The eave section 5a is etched directly and removed only by a section corresponding to the width (w) of a junction section 4 in the direction vertical to the stepped section by using the ion beams of potassium or the like. The whole upper surface is coated with a superconductor film composed of NbPb, etc. through an evaporation method, and a superconductor 2 is formed on the metallic film 5, the superconductor 3 on the silicon substrate 1 in the lower stepped section of the stepped section and a coupling section 4 to a section, from which the eave section 5a is removed, at the stepped section.
Inventors:
WATAKABE YAICHIROU
MORIMOTO HIROAKI
MORIMOTO HIROAKI
Application Number:
JP15193483A
Publication Date:
March 08, 1985
Filing Date:
August 20, 1983
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L39/24; (IPC1-7): H01L39/24
Domestic Patent References:
| JPS56114388A | 1981-09-08 |
Attorney, Agent or Firm:
Masuo Oiwa