PURPOSE: To deposit continuously patterns of high dimensional accuracy by evaporation with high productivity on a beltlike metallic body by uncoiling simultaneously the beltlike metallic body and a beltlike metallic body for shielding having through-holes respectively from coils, superposing both metallic bodies and depositing metal by evaporation thereon through the through-holes.
CONSTITUTION: A long-sized beltlike metallic body 6 to be deposited with patterns by evaporation on the surface and a long-sized beltlike metallic body 7 having through-hole patterns 17 corresponding to the shape of patterned vapor deposited films 20 are simultaneously uncoiled respectively from coiled 8, 9 states and are superposed and passed, with the body 6 on the inside, on a rotary drum 14 with press rolls 10, 11, 12, 13. The metallic vapor flow 16 generated from an evaporating source 16 is passed through the holes 17 and the desired patterns 20 are deposited by evaporation on the body 6. The bodies 6, 7 are separated thereafter and are coiled 18, 19 respectively. The vapor deposition is accomplished with high productivity by the above-mentioned method, and the increase in the thickness of vapor deposition and the speed of vapor deposition is made possible.
| JP5410377 | Mask set |
| JP2024052943 | vapor deposition mask |
| JP4784145 | How to attach metal tape, how to manufacture mask unit and jig for adding tension |
MIYAKE YASUHIKO
ONDA MAMORU
SONEDA SEIJI
| JPS596372A | 1984-01-13 |
Next Patent: VACUUM DEPOSITION FURNACE