Title:
ELECTRODE TRIMMING DEVICE
Document Type and Number:
Japanese Patent JPS6038816
Kind Code:
A
Abstract:
PURPOSE:To obtain a device with which a trimming can be automatically performed on the unsatisfactory electrode among a plurality of electrodes that are radically arranged on the main surface of a semiconductor substrate such as a transistor, a gate turn-off thyristor and the like. CONSTITUTION:A jig whereon work 1 is set on the rotary table 302 of a moving stage 601, and an inverted bias voltage is successively applied between the base electrode of the work 1 and each probe 408. If current is applied when biased invertedly, it indicates that there is a defective part somewhere, and when the confirmation of defective position to a memory part 802 is finished, the work 1 is returned to its original position by the second signal s2 through the intermediary of a rotary table 302. Then, the moving stage 601 is moved in the direction of the bite header mechanism located on the left side by the first signal s1. By receiving the notification of defective part from the memory part 802, the work 1 is rotated by the second signal s2, and the electrode at the defective part is moved to the part of a bite 507. Then, a cylinder 505 is driven by the fourth signal s4, and when the work 1 is moved along the two-dot chain line B in the diagram to Y-direction on the left side using a pulse motor 604 by the first signal s1 after the bite 507 has been brought to come in contact with the electrode, the electrode can be cut.
Inventors:
NISHIYAMA TATSUO
NAGABORI WATARU
NAGABORI WATARU
Application Number:
JP14644383A
Publication Date:
February 28, 1985
Filing Date:
August 12, 1983
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/28; H01L21/66; H01L29/74; (IPC1-7): H01L29/74
Attorney, Agent or Firm:
Katsuo Ogawa