PURPOSE: To largely improve the withstand voltage of a GaAsFET by forming a buffer layer using an AlGaAs layer doped with O2 and laminating an active layer composed of GaAs doped with Si thereon.
CONSTITUTION: The buffer layer 2 composed of the AlGaAs layer doped with O2 is formed on a semi-insulation substrate 1 by a molecular ray epitaxial growing method. On the AlGaAs layer 2, the active layer 3 composed of the GaAs doped with Si as an N type impurity is grown. The GaAsFET is completed by forming a gate electrode 4 in Schottky contact with the active layer 3 and a source 5 and a drain electrode 6 in ohmic contact with the active layer 3. The buffer layer can be increased in insulation thereby, therefore the GaAsFET can be more increased in withstand voltage.
NISHI HIDETOSHI
HIRACHI YASUTAKA
JPS5595370A | 1980-07-19 | |||
JPS51103783A | 1976-09-13 |