Title:
WAFER STOPPER
Document Type and Number:
Japanese Patent JPS60117746
Kind Code:
A
Abstract:
PURPOSE:To enable accurate center positioning by easy change in the stopping position of the tip of a wafer according to the wafer diameter by a method wherein the titled device is composed of a pin holding table having pinning holes, a plurality of pins, a stud, and a driving means to move it in vertical directions. CONSTITUTION:The U-shaped pin holding table 5 is fixed to a pivotable table 2. Three pairs of pinning holes 6, 6, 7, 7', and 8, 8' making pairs are formed at both ends of the pin holding tabke, and two pair-making pins 9 and 9' to stop the movement of wafers in abutment with them are acrewed to this hole. Further, the stud 10 abuts against the under-surface of the table 2 at the upper end. This stud can move up and down in vertical directions by the driving means 11. When the wafers are stop at required positions in a wafer cassette, the stud is extended upward by the driving means, so as to project the pin 9 above the surface of a belt 4. Thus, the scattering of wafer stopping positions due to the disagreement of timing of the stopping of carrier belt drive can be completely eliminated.
Inventors:
IWATA YOSHIKI
KAWASE NOBUO
TANAKA KEITOKU
MIYAKE TAKASHI
KAWAURA HIROSHI
KAWASE NOBUO
TANAKA KEITOKU
MIYAKE TAKASHI
KAWAURA HIROSHI
Application Number:
JP22623383A
Publication Date:
June 25, 1985
Filing Date:
November 30, 1983
Export Citation:
Assignee:
CANON HANBAI KK
CANON KK
CANON KK
International Classes:
B65G47/88; H01L21/67; H01L21/677; H01L21/68; (IPC1-7): B65G47/88
Domestic Patent References:
| JPS5684226A | 1981-07-09 | |||
| JPS5338513A | 1978-04-08 |
Attorney, Agent or Firm:
Marushima Giichi
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