【考案の名称】真空度監視装置

Title:

【考案の名称】真空度監視装置

Document Type and Number:

Japanese Patent JPS60188348

Kind Code:

U

Inventors:

Shotaro Urushihara
Seiichi Kamata
Hiraoka Josuke

Application Number:

JP7465584U

Publication Date:

December 13, 1985

Filing Date:

May 22, 1984

Export Citation:

International Classes:

H01H33/66; G01L21/00; (IPC1-7): G01L21/00; H01H33/66

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