Title:
【考案の名称】真空度監視装置
Document Type and Number:
Japanese Patent JPS6093939
Kind Code:
U
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Inventors:
Tetsuo Jojo
Application Number:
JP18602083U
Publication Date:
June 26, 1985
Filing Date:
December 01, 1983
Export Citation:
International Classes:
H01H33/66; G01L21/00; (IPC1-7): G01L21/00; H01H33/66