Title:
APPARATUS FOR MANUFACTURING SEMICONDUCTOR CRYSTAL
Document Type and Number:
Japanese Patent JPS5849686
Kind Code:
A
Abstract:
PURPOSE:To obtain a semiconductor crystal-manufacturing apparatus capable of continually and accurately monitoring the rate of the descending motion of an ampule for crystallization into an electric furnace, by winding a resistant wire to a spool in several turns, and delivering the wire according to the lowering of the sampule. CONSTITUTION:The length of the resistant wire 21 hang on the pulley 7 increases according to the lowering of the ampule 1. The tip of the protruded metallic arm 28 interlocked with the descending motion of the lowering device 3 is brought into contact with the point P3 of a vertically arranged conductive member 22 through a castor-type movable contact 31. The member 22 and the spool 23 are connected to e.g. an AC source 24. The wire 21 is also contacted with the pulley-type stationary contact 30 at the point P2, and the wire 21 is connected electrically with the arm 28 at the predetermined point P1. By the above arrangement, the wire 21 is delivered according to the lowering motion of the ampule 1, and the contact 31 is lowered keeping the contact with the member 22. Accordingly, the electrical conductive loop composed of the wire 21, the member 22, the spool 23 and the electrical source 24 is extended according to the lowering of the ampule 1, i.e. the delivery of the wire 21.
Inventors:
NISHIJIMA YOSHITO
YAMAMOTO KOUSAKU
KAWABATA YOSHIO
FUKUDA HIROKAZU
YAMAMOTO KOUSAKU
KAWABATA YOSHIO
FUKUDA HIROKAZU
Application Number:
JP14976581A
Publication Date:
March 23, 1983
Filing Date:
September 21, 1981
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
C30B11/00; H01L21/208; (IPC1-7): C30B11/00; H01L21/34
Attorney, Agent or Firm:
Sadaichi Igita