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Title:
INSPECTION FOR LASER DIODE
Document Type and Number:
Japanese Patent JPS6022391
Kind Code:
A
Abstract:

PURPOSE: To shorten the inspecting time and to improve the inspection precision by a method wherein the characteristics of the laser diode are inspected, keeping the laser diode as it is in a state of bar.

CONSTITUTION: A laser diode bar 7 is constituted of plural pieces of laser diode elements 1, top electrodes 2 isolated in each element 1, a bottom electrode 3 common to each element 1 and a reflective surface 4 having light-emitting region parts 5, which amplifies generated light and emits laser beams 8. The bar 7 is fixed on a stage 16, whose surface consists of a good conductor, by sucking with a suction hole 20. A probe 19a for inspection is made to contact with the top electrode 2 of the element 1, while the other probe 19b is made to contact with the surface of the stage 16 and current is flowed, each element 1 is made to emit light and laser beams 8 are detected by a sensor 17 and inspected.


Inventors:
KINOSHITA MASAO
Application Number:
JP13067983A
Publication Date:
February 04, 1985
Filing Date:
July 18, 1983
Export Citation:
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Assignee:
NIPPON ELECTRIC CO
International Classes:
H01L21/66; H01S5/00; H01S5/022; H01S5/02; H01S5/40; (IPC1-7): H01L21/66; H01S3/18
Domestic Patent References:
JPS56169389A1981-12-26
Attorney, Agent or Firm:
Uchihara Shin