HEATER - HITACHI LTD

Title:

HEATER

Document Type and Number:

Japanese Patent JPS60105195

Kind Code:

A

Inventors:

AMADA HARUO
YAMADA SEIICHI
MIYAZAKI ISAO
TAKAZAWA AKIRA

Application Number:

JP21081483A

Publication Date:

June 10, 1985

Filing Date:

November 11, 1983

Export Citation:

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Assignee:

HITACHI LTD

International Classes:

H05B6/70; C23C16/00; C23C16/46; F27D11/12; H01L21/18; H01L21/205; H01L21/22; H01L21/31; (IPC1-7): C23C16/00; F27D11/12; H01L21/18; H01L21/205; H01L21/22; H01L21/31; H05B6/70

Attorney, Agent or Firm:

Akio Takahashi

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