Title:
METHOD OF PRODUCING SEMICONDUCTOR WAFER
Document Type and Number:
Japanese Patent JPS5935429
Kind Code:
A
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Inventors:
JIYAGUTAA SHIN BASHI
ERITSUKU MANDERU
ERITSUKU MANDERU
Application Number:
JP8285483A
Publication Date:
February 27, 1984
Filing Date:
May 13, 1983
Export Citation:
Assignee:
IBM
International Classes:
H01L21/304; C09G1/02; H01L21/306; (IPC1-7): H01L21/304
Domestic Patent References:
JPS5099685A | 1975-08-07 |
Foreign References:
US3966432A | 1976-06-29 | |||
US4169796A | 1979-10-02 |
Attorney, Agent or Firm:
Tsukio Okada
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