Title:
THIN FILM ELECTROTHERMAL MOVING DEVICE
Document Type and Number:
Japanese Patent JPS5973826
Kind Code:
A
Abstract:
Thin film multilayer technology is used to build microminiature electromechanical switches having low resistance metal-to-metal contacts and distinct on-off characteristics. The switches, which are electrothermally actuated, are fabricated on conventional hybrid circuit substrates using processes compatible with those employed to produce thin-film electrical circuits. In a preferred form, such a switch includes a cantilever actuating member comprising a resiliently bendable strip of a hard insulating material (e.g., silicon nitride) to which a metal (e.g., nickel) heating element is bonded. The free end of the cantilever member carries a metal contact, which is moved into (or out of) engagement with an underlying fixed contact by controlled bending of the member via electrical current applied to the heating element.
Inventors:
ROBAATO AREN MIYUURAA
Application Number:
JP13356783A
Publication Date:
April 26, 1984
Filing Date:
July 21, 1983
Export Citation:
Assignee:
TEKTRONIX INC
International Classes:
H01H37/32; B81B3/00; H01H37/52; H01H61/00; H01H61/02; H01H61/04; H01H1/00; H01H1/20; (IPC1-7): H01H37/32; H01H61/04
Domestic Patent References:
| JPS4971763U | 1974-06-21 |
Foreign References:
| US3763454A | 1973-10-02 |
Attorney, Agent or Firm:
Hidekuma Matsukuma (1 outside)
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